Shutdown AG4100 SNF 2010-05-14 23:56:30: Coolant hose came off

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Fri May 14 23:56:31 PDT 2010


Coolant hose came off during anneal.  Large puddle of coolant around the machine.  I unplugged the pump and turned off the two coolant line valves.  pushed the EMO button.   I got as many yellow pads as there was, some of the liquid barrier snakes and absorbant pillows.  Put up yellow Caution stands and roped off area with caution tape.
Test wafer is still inside the machine.  




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