Comment AG4100 SNF 2010-05-20 15:29:37: Mechanical testing

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu May 20 15:29:37 PDT 2010


Installed strain relief for the the door cooling lines.  Wiped down the wafer load area.  Cycled two wafers with no problems.  
Wafer cassettes are very dirty.  need to clean the




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