Comment AG4100 SNF 2010-05-21 15:54:52: Qual. May 21, 2010

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri May 21 15:54:53 PDT 2010


Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. 
wafer 1: Avg 134 SD 5.6
wafer 2: Avg 138 SD 8.0
wafer 3: Avg 134 SD 7.3
wafer 4: Avg 133 SD 6.2
wafer 5: Avg 132 SD 6.6
May 14 Qual was 132 Ang
February Qual thickness was 130 Ang.  




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