Comment AG4100 SNF 2010-05-21 16:00:20: Water flow at 2.5gpm

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri May 21 16:00:20 PDT 2010


After cleaning out the cooling lines the system water flow is just above 2.5gpm at 75psi on a heat exchanger.  When the tool was installed flow was just below 2gpm.  During the 5 wafer, 1150C, 30sec qual run the temperature sensors installed by John peaked around 28C.  In previous runs the senor temperature increased about 25C with each wafer. 




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