Problem AG4100 SNF 2010-05-21 17:01:25: lamp dropout for long (10min) 550C run...

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Fri May 21 17:01:25 PDT 2010


Ran several wafers for as long as 10min at both 450C and 500C without any problems.  >2.5gpm water flow and both top and bottom Tc readings were in the 19C-26C range.  However, lamps shut down when running 550C, 10min anneal.  Tried running 3 times and lamps shut down at ~7min the 1st 2 times, ~3min the 3rd time.




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