Comment AG4100 SNF 2010-05-26 17:43:35: peeling wafer update - ran add'l wafers OK...

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Wed May 26 17:43:36 PDT 2010


I ran 3 test wafers and did not see any visible defects/particles on them as they came out of the chamber.  I then ran 12 of my product wafers, and they also looked OK.
Robert




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