From ryhuang at snf.stanford.edu Mon Oct 4 14:00:36 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Mon, 4 Oct 2010 14:00:36 -0700 Subject: Problem AG4100 SNF 2010-10-04 14:00:36: 1st wafer misalignment... Message-ID: When running in automode, I found that if you use slot #1 in the send cassette, that wafer doesn't get aligned properly to the robot such that when the wafer is taken from the chamber to the cooling station, the wafer only lands on 2 of the 3 pins (front pin gets missed). I was able to run my wafers in auto without any problems by starting from slot #2. Robert From horvath at snf.stanford.edu Thu Oct 14 06:19:29 2010 From: horvath at snf.stanford.edu (horvath at snf.stanford.edu) Date: Thu, 14 Oct 2010 06:19:29 -0700 Subject: Comment AG4100 SNF 2010-10-14 06:19:29: misplacement on cooling station Message-ID: Machine misplaced the first 2 wafers onto the cooling station. Problem disappeared with the third wafer.