Problem AG4100 SNF 2010-10-04 14:00:36: 1st wafer misalignment...

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Mon Oct 4 14:00:36 PDT 2010


When running in automode, I found that if you use slot #1 in the send cassette, that wafer doesn't get aligned properly to the robot such that when the wafer is taken from the chamber to the cooling station, the wafer only lands on 2 of the 3 pins (front pin gets missed).  I was able to run my wafers in auto without any problems by starting from slot #2.
Robert




More information about the AG4100-pcs mailing list