Comment AG4100 SNF 2010-10-14 06:19:29: misplacement on cooling station
horvath at snf.stanford.edu
horvath at snf.stanford.edu
Thu Oct 14 06:19:29 PDT 2010
Machine misplaced the first 2 wafers onto the cooling station. Problem disappeared with the third wafer.
More information about the AG4100-pcs
mailing list