From emyers at snf.stanford.edu Thu Sep 2 09:58:21 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 2 Sep 2010 09:58:21 -0700 Subject: Comment AG4100 SNF 2010-09-02 09:58:21: Robot is acting up Message-ID: On my first try the robot would not get the wafer out of the chamber following the anneal. After waiting it returned to the home position and lost it's servo. After rebooting and homing the next single wafer attempt went fine. From ajamo at snf.stanford.edu Thu Sep 2 10:12:26 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:12:26 -0700 Subject: Problem AG4100 SNF 2010-09-02 10:12:25: Robot Arm problems Message-ID: Tried to run some wafers last night & robot arm repeatedly got stuck in the extend position. Tried re-setting the robot, it would re-initialize just fine but would get stuck again when I tried to run a wafer. From ryhuang at snf.stanford.edu Thu Sep 2 10:59:14 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Thu, 2 Sep 2010 10:59:14 -0700 Subject: Shutdown AG4100 SNF 2010-09-02 10:59:14: robot arm stuck in chamber with door open... Message-ID: Continue to have robot problems in auto mode. Before running a wafer, the robot got stuck partly inside chamber with door open. Then the preheat started. I immediately hit the emergency off button. Robert From shott at snf.stanford.edu Thu Sep 2 14:47:57 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 2 Sep 2010 14:47:57 -0700 Subject: Comment AG4100 SNF 2010-09-02 14:47:57: Something to look at related to robot problems .... Message-ID: While this may be viewed as simply the idle musing of someone who doesn't spend nearly enough time in the lab, it occurs to me that the robot, the cabling to it and the robot controller were all in pretty close proximity to the spraying water that occurred several months ago when the cooling water was blocked, the door overheated, and the Tygon tubing to the door got heated to the point that it popped off the little hose barb fittings and sprayed the entire area with water. I would suggest that it is a cheap experiment to power down the robot controller and carefully disconnect, clean, and re-connect all cables and connections that are readily accessible on the robot handling system. While it may do nothing of use, it seems as if it a comparatively easy thing to do and may point toward contact corrosion as the source of intermittent robot failures. Thanks for bearing with me, John From emyers at snf.stanford.edu Mon Sep 13 15:05:10 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:05:10 -0700 Subject: Comment AG4100 SNF 2010-08-27 17:59:56: wafer removed Message-ID: Seems to the start of our robot problems. From emyers at snf.stanford.edu Mon Sep 13 15:05:39 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:05:39 -0700 Subject: Problem AG4100 SNF 2010-08-31 22:44:27: wafer handling Message-ID: Part of our robot problems From emyers at snf.stanford.edu Mon Sep 13 15:05:58 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:05:58 -0700 Subject: Comment AG4100 SNF 2010-09-02 09:58:21: Robot is acting up Message-ID: Part of our robot problems From emyers at snf.stanford.edu Mon Sep 13 15:06:13 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:06:13 -0700 Subject: Problem AG4100 SNF 2010-09-02 10:12:25: Robot Arm problems Message-ID: Part of our robot problems From emyers at snf.stanford.edu Mon Sep 13 15:07:34 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:07:34 -0700 Subject: Shutdown AG4100 SNF 2010-09-13 15:07:33: Robot extension failure Message-ID: I was able to get the corrupted configuration file corrected, but it did not solve our problems. The robot initiallizes fine, but it de-servo's when it trys to extend. It failed at the oven and at the send station. From eenriquez at snf.stanford.edu Wed Sep 15 16:07:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 16:07:21 -0700 Subject: Shutdown AG4100 SNF 2010-09-02 10:59:14: robot arm stuck in chamber with door open... Message-ID: Vendor replaced the robot's motor controller board. Ran 12 wafers with no problems. From eenriquez at snf.stanford.edu Wed Sep 15 16:07:26 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 16:07:26 -0700 Subject: Shutdown AG4100 SNF 2010-09-13 15:07:33: Robot extension failure Message-ID: Vendor replaced the robot's motor controller board. Ran 12 wafers with no problems. From horvath at snf.stanford.edu Wed Sep 15 18:20:01 2010 From: horvath at snf.stanford.edu (horvath at snf.stanford.edu) Date: Wed, 15 Sep 2010 18:20:01 -0700 Subject: Comment AG4100 SNF 2010-09-15 18:20:01: Tool is working fine so far Message-ID: I have just run 4 test wafers through at 750C and the system worked fine. Thanks!!