Comment AG4100 SNF 2010-09-02 09:58:21: Robot is acting up

emyers at snf.stanford.edu emyers at snf.stanford.edu
Thu Sep 2 09:58:21 PDT 2010


On my first try the robot would not get the wafer out of the chamber following the anneal.  After waiting it returned to the home position and lost it's servo.  After rebooting and homing the next single wafer attempt went fine.




More information about the AG4100-pcs mailing list