Problem AG4100 SNF 2010-09-02 10:12:25: Robot Arm problems

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Thu Sep 2 10:12:26 PDT 2010


Tried to run some wafers last night & robot arm repeatedly got stuck in the extend position.   Tried re-setting the robot,  it would re-initialize just fine but would get stuck again when I tried to run a wafer.




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