Shutdown AG4100 SNF 2010-09-02 10:59:14: robot arm stuck in chamber with door open...

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Thu Sep 2 10:59:14 PDT 2010

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Continue to have robot problems in auto mode.  Before running a wafer, the robot got stuck partly inside chamber with door open.  Then the preheat started.  I immediately hit the emergency off button.
Robert

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