From eenriquez at snf.stanford.edu Mon Mar 21 15:01:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Mar 2011 15:01:12 -0700 Subject: Shutdown AG4100 SNF 2011-03-21 15:01:12: TC calibration Message-ID: From eenriquez at snf.stanford.edu Wed Mar 23 13:28:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Mar 2011 13:28:54 -0700 Subject: Shutdown AG4100 SNF 2011-03-21 15:01:12: TC calibration Message-ID: Completed pyrometer calibration using the new TC wafer. I ran a test where I set the power at 15% (~ 680 C) and watched how closely the pyrometer and TC temperature matched. Before the cal, the difference was about 50 C. Not great but not the ~ 185 C difference that the user saw. After the cal with the OLD TC wafer, the difference was ~ 2 C. However,the difference at the temperature setting that the user wanted to run at (550 C ~ 11% power) was about 13 C. Using the calibration curve from the NEW TC wafer, the temperature difference at 550C was ~ 2 C but the difference at the 15% power was about 12 C. The system is now using the cal curve from the NEW TC wafer. From eenriquez at snf.stanford.edu Wed Mar 23 15:39:08 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Mar 2011 15:39:08 -0700 Subject: Problem AG4100 SNF 2011-03-23 15:39:06: Needs a process qualification Message-ID: From eenriquez at snf.stanford.edu Thu Mar 24 12:20:31 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Mar 2011 12:20:31 -0700 Subject: Comment AG4100 SNF 2011-03-24 12:20:30: Update over temp Message-ID: Ran a 650 C, 10 min anneal recipe 4 X (one after the other) without any problems. The maximum temperature that the top plate reached was 74 C. One possible explanation for the overtemp problem is that the water recirculator might have shut off during the user's run. Yesterday, while I was running tests, the recirculator shut-off for some reason and the tool faulted for for Max Temperature Limit. From eenriquez at snf.stanford.edu Wed Mar 30 10:31:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Mar 2011 10:31:37 -0700 Subject: Shutdown AG4100 SNF 2011-03-30 10:31:37: Cleaning cooling channels Message-ID: The top plate cooling channels are completely clogged. We are trying to flush it out. From eenriquez at snf.stanford.edu Wed Mar 30 17:48:45 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Mar 2011 17:48:45 -0700 Subject: Shutdown AG4100 SNF 2011-03-30 10:31:37: Cleaning cooling channels Message-ID: Was able to clear-out the top chamber plate by using a long drill bit and high pressure N2. Now getting about 1/4 gpm through the top plate. Ran 650 C, 10 min anneal recipe 3X (one after the other) and had no problems. The maximum temperature that the top plate reached was 26.5 C. We will purge out the cooling system once a month to try to prevent the it from clogging.