Comment AG4100 SNF 2011-03-24 12:20:30: Update over temp

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Mar 24 12:20:31 PDT 2011


Ran a 650 C, 10 min anneal recipe 4 X (one after the other) without any problems.  The maximum temperature that the top plate reached was 74 C.
One possible explanation for the overtemp problem is that the water recirculator might have shut off during the user's run.  Yesterday, while I was running tests, the recirculator shut-off for some reason and the tool faulted for for Max Temperature Limit.




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