Shutdown AG4100 SNF 2011-03-30 10:31:37: Cleaning cooling channels

eenriquez at eenriquez at
Wed Mar 30 17:48:45 PDT 2011

Was able to clear-out the top chamber plate by using a long drill bit and high pressure N2.  Now getting about 1/4 gpm through the top plate.  Ran 650 C, 10 min anneal recipe 3X (one after the other) and had no problems.  The maximum temperature that the top plate reached was 26.5 C.
We will purge out the cooling system once a month to try to prevent the it from clogging.

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