Problem AG4100 SNF 2011-05-13 09:29:34: poor wafer handling (receive cassette)

wslee at snf.stanford.edu wslee at snf.stanford.edu
Fri May 13 09:29:34 PDT 2011


Put the first wafer in slot 25 and shook the cassette quite a bit.  The second wafer went into the cassette, came back out with the robot arm, and dropped out of the cassette.




More information about the AG4100-pcs mailing list