Problem AG4100 SNF 2011-05-13 09:29:34: poor wafer handling (receive cassette)

wslee at wslee at
Fri May 13 09:29:34 PDT 2011

Put the first wafer in slot 25 and shook the cassette quite a bit.  The second wafer went into the cassette, came back out with the robot arm, and dropped out of the cassette.

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