Problem AG4100 SNF 2011-05-13 09:29:34: poor wafer handling (receive cassette)
wslee at snf.stanford.edu
wslee at snf.stanford.edu
Fri May 13 09:29:34 PDT 2011
Put the first wafer in slot 25 and shook the cassette quite a bit. The second wafer went into the cassette, came back out with the robot arm, and dropped out of the cassette.
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