From wslee at snf.stanford.edu Sat Sep 3 13:35:24 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sat, 3 Sep 2011 13:35:24 -0700 Subject: Problem AG4100 SNF 2011-09-03 13:35:24: chamber cleaniness Message-ID: the top quartz seems dirty in the center. From emyers at snf.stanford.edu Wed Sep 7 09:22:45 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 7 Sep 2011 09:22:45 -0700 Subject: Problem AG4100 SNF 2011-09-03 13:35:24: chamber cleaniness Message-ID: There is some deposition, but not enough for a chamber clean. Thank you for reporting the status. From emyers at snf.stanford.edu Tue Sep 13 13:55:36 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 13 Sep 2011 13:55:36 -0700 Subject: Shutdown AG4100 SNF 2011-09-13 13:55:36: Shutdown for removal Message-ID: From shott at snf.stanford.edu Mon Sep 26 06:00:50 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:00:50 -0700 Subject: Problem AG4100 SNF 2010-05-21 17:01:25: lamp dropout for long (10min) 550C run... Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:00:56 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:00:56 -0700 Subject: Problem AG4100 SNF 2010-08-23 15:55:32: Still having N2O flow problems... Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:01 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:01 -0700 Subject: Problem AG4100 SNF 2010-08-24 08:23:25: N2O Flow Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:07 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:07 -0700 Subject: Comment AG4100 SNF 2010-09-02 14:47:57: Something to look at related to robot problems .... Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:12 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:12 -0700 Subject: Comment AG4100 SNF 2010-09-15 18:20:01: Tool is working fine so far Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:17 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:17 -0700 Subject: Problem AG4100 SNF 2010-10-04 14:00:36: 1st wafer misalignment... Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:23 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:23 -0700 Subject: Comment AG4100 SNF 2010-10-14 06:19:29: misplacement on cooling station Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:29 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:29 -0700 Subject: Problem AG4100 SNF 2010-11-12 10:18:42: Over Temp Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:35 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:35 -0700 Subject: Problem AG4100 SNF 2010-11-13 00:06:37: More overtemp Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:41 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:41 -0700 Subject: Problem AG4100 SNF 2011-03-23 15:39:06: Needs a process qualification Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:45 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:45 -0700 Subject: Problem AG4100 SNF 2011-05-13 09:29:34: poor wafer handling (receive cassette) Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:51 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:51 -0700 Subject: Problem AG4100 SNF 2011-05-17 11:39:43: more robot problems Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John From shott at snf.stanford.edu Mon Sep 26 06:01:56 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 26 Sep 2011 06:01:56 -0700 Subject: Shutdown AG4100 SNF 2011-09-13 13:55:36: Shutdown for removal Message-ID: Clearing problems, comments, and shutdowns prior to removal from Coral equipment tree. John