September 2011 Archives by thread

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Starting: Sat Sep 3 13:35:24 PDT 2011
Ending: Mon Sep 26 06:01:56 PDT 2011
Messages: 16

• Problem AG4100 SNF 2011-09-03 13:35:24: chamber cleaniness   wslee at snf.stanford.edu
  • Problem AG4100 SNF 2011-09-03 13:35:24: chamber cleaniness   emyers at snf.stanford.edu
• Shutdown AG4100 SNF 2011-09-13 13:55:36: Shutdown for removal   emyers at snf.stanford.edu
  • Shutdown AG4100 SNF 2011-09-13 13:55:36: Shutdown for removal   shott at snf.stanford.edu
• Problem AG4100 SNF 2010-05-21 17:01:25: lamp dropout for long (10min) 550C run...   shott at snf.stanford.edu
• Problem AG4100 SNF 2010-08-23 15:55:32: Still having N2O flow problems...   shott at snf.stanford.edu
• Problem AG4100 SNF 2010-08-24 08:23:25: N2O Flow   shott at snf.stanford.edu
• Comment AG4100 SNF 2010-09-02 14:47:57: Something to look at related to robot problems ....   shott at snf.stanford.edu
• Comment AG4100 SNF 2010-09-15 18:20:01: Tool is working fine so far   shott at snf.stanford.edu
• Problem AG4100 SNF 2010-10-04 14:00:36: 1st wafer misalignment...   shott at snf.stanford.edu
• Comment AG4100 SNF 2010-10-14 06:19:29: misplacement on cooling station   shott at snf.stanford.edu
• Problem AG4100 SNF 2010-11-12 10:18:42: Over Temp   shott at snf.stanford.edu
• Problem AG4100 SNF 2010-11-13 00:06:37: More overtemp   shott at snf.stanford.edu
• Problem AG4100 SNF 2011-03-23 15:39:06: Needs a process qualification   shott at snf.stanford.edu
• Problem AG4100 SNF 2011-05-13 09:29:34: poor wafer handling (receive cassette)   shott at snf.stanford.edu
• Problem AG4100 SNF 2011-05-17 11:39:43: more robot problems   shott at snf.stanford.edu

Last message date: Mon Sep 26 06:01:56 PDT 2011
Archived on: Sun Dec 23 08:33:39 PST 2012

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