Low Ammonia RTA Gas?

Ed Myers edmyers at stanford.edu
Mon Jun 9 16:22:03 PDT 2008


I was watching a nitridation process this afternoon.  The Ammonia 
flow steadily decreased during the process as did the delivery 
pressure for the gas.  I checked the gas bottle in the gas bunker 
with mixed results.  I have informed the maintenance staff with the 
hope of a quick resolution.

In the mean time, you may not have ammonia during your process.


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