From shott at stanford.edu Sat Nov 1 13:28:50 2008 From: shott at stanford.edu (John Shott) Date: Sat, 01 Nov 2008 13:28:50 -0700 Subject: Any Updates regarding when the machines will be up ? In-Reply-To: References: Message-ID: <490CBC02.5030304@stanford.edu> Ritesh and RTA community: As you are likely aware, we recently added a new heat exchanger to provide cooling to both the AG4100 and the AG4108. About a week ago, a water line in the AG4100 began leaking and both systems were shutdown at that time. We've repaired the broken line and also repaired a couple of others that seemed to be in a similar condition to the one that broke. I have cleared the AG4108 and believe that it should be fully operational. I've cleared the water-related shutdown on the AG4100, but will caution everyone that I fear that Elmer has not had time to resolve the air leak that has been affecting this system. Anyone that would be sensitive to air exposure during RTA treatement in this system should wait proper resolution of that issue. I'm hopeful that Cesar may be able to investigate that tomorrow or that Elmer will have time to get back to that issue on Monday. Let me know if you have any further questions, John From edmyers at stanford.edu Sat Nov 1 14:12:18 2008 From: edmyers at stanford.edu (Ed Myers) Date: Sat, 01 Nov 2008 14:12:18 -0700 Subject: Any Updates regarding when the machines will be up ? In-Reply-To: <490CBC02.5030304@stanford.edu> References: <490CBC02.5030304@stanford.edu> Message-ID: <6.2.5.6.2.20081101140617.03010360@stanford.edu> RTP Community, I believe John is correct regarding the atmosphere leak remaining in the AG4100. If anyone wishes to test the system, there is a box of Ti wafers on the table next to the system which you can use. As for the AG4108, John is more optimistic than I am. I'm not sure we have completely resolved the over temperature problems as it seems to come and go. Please test the system before you commit critical wafers. Unfortunately, I do not have any test wafers readily available for the system. Regards, Ed At 01:28 PM 11/1/2008, John Shott wrote: >Ritesh and RTA community: > >As you are likely aware, we recently added a new heat exchanger to >provide cooling to both the AG4100 and the AG4108. About a week >ago, a water line in the AG4100 began leaking and both systems were >shutdown at that time. > >We've repaired the broken line and also repaired a couple of others >that seemed to be in a similar condition to the one that broke. > >I have cleared the AG4108 and believe that it should be fully operational. > >I've cleared the water-related shutdown on the AG4100, but will >caution everyone that I fear that Elmer has not had time to resolve >the air leak that has been affecting this system. Anyone that would >be sensitive to air exposure during RTA treatement in this system >should wait proper resolution of that issue. > >I'm hopeful that Cesar may be able to investigate that tomorrow or >that Elmer will have time to get back to that issue on Monday. > >Let me know if you have any further questions, > >John > > From edmyers at stanford.edu Fri Nov 7 16:47:33 2008 From: edmyers at stanford.edu (Ed Myers) Date: Fri, 07 Nov 2008 16:47:33 -0800 Subject: Regarding Shutdown AG4100 SNF 2008-11-07 Message-ID: <6.2.5.6.2.20081107164402.030c3878@stanford.edu> All, This chamber was very heavily coated. Either the last person did everyone a disservice by running a risky process or many lab members are failing to look at the chamber. Remember looking at the chamber prior to running your wafers is part of the operating procedure. You are the eyes which help us track the chamber lifetime and determine when it needs a clean. Regards, Ed >Subject: Shutdown AG4100 SNF 2008-11-07 14:26:46: Update >Date: Fri, 7 Nov 2008 14:26:46 -0800 >From: eenriquez at snf.stanford.edu >To: AG4100-pcs at snf.stanford.edu > >Chamber is very dirty and discolored. Mike installed a clean >chamber. Need to perform a pyrometer calibration. From shott at stanford.edu Fri Nov 14 18:02:07 2008 From: shott at stanford.edu (John Shott) Date: Fri, 14 Nov 2008 18:02:07 -0800 Subject: Update .... Message-ID: <491E2D9F.3070002@stanford.edu> AG4100 (and 4108) fans: As you may know ..... particularly if you read Ed's Coral equipment comments .... the entire metal furnace enclosure of the AG4100 was sent out for a complete tear down this week. They found that a number of the internal cooling channels had become occluded by corrosion. This has likely been gradually restricting cooling flow for some time and these lines may have even had significant blockage when we received this used tool several years ago. In any event, AllWin will be back with the refurbished assembly on Wednesday to reinstall and test the system. The door leak that we have been experiencing should be addressed at that time and, of course, wafer qualification will follow. Finally, while field service is here, they plan to remove the enclosure from the AG4108 to rebuild it as well. When these rebuilds are completed we expect to be free of cooling-related problems for sometime which, I am confident, will be good news for many of you. Have a good weekend, John