Problem AG4108 2001-12-11 17:11:55: no load from cooling to receiving

mcconnel at snf.stanford.edu mcconnel at snf.stanford.edu
Tue Dec 11 05:11:57 PST 2001


Each wafer is removed from the furnace and placed on the cooling station, but the wafer is not transferred from the cooling station to the receiving cassette.  The controller does not remember that the wafer is on the cooling station.  One time a wafer was still on the cooling station when another wafer came out of the furnace;  this wafer was nevertheless placed on the cooling station, which pushed the first wafer off of the cooling station onto the floor of the machine.




More information about the AG4108-pcs mailing list