From balaji at snf.stanford.edu Fri Nov 9 11:19:41 2001 From: balaji at snf.stanford.edu (balaji at snf.stanford.edu) Date: Nov 9, 2001 11:19:41 AM Subject: Problem AG4108 2001-11-09 11:19:39: dirty chamber Message-ID: Circular, dark region present on the floor and ceiling of the chamber, right above/below where the wafer sits. Whatever it is, its not good. Heating non-uniformities may occur. For instance, slip lines have been noticed on Si at temp. as low as 800C RTA for 30 sec! From booth at snf.stanford.edu Tue Nov 13 08:00:28 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 13, 2001 8:00:28 AM Subject: Problem AG4108 2001-11-09 11:19:39: dirty chamber Message-ID: changed for clean one.