Problem AG4108 2001-11-09 11:19:39: dirty chamber

balaji at snf.stanford.edu balaji at snf.stanford.edu
Fri Nov 9 11:19:41 PST 2001


Circular, dark region present on the floor and ceiling of the chamber, right above/below where the wafer sits. Whatever it is, its not good. Heating non-uniformities may occur. For instance, slip lines have been noticed on Si at temp. as low as 800C RTA for 30 sec!




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