Problem AG4108 2001-09-21 11:16:46: NH3 feedbk not zero even if set to Zero

balaji at snf.stanford.edu balaji at snf.stanford.edu
Fri Sep 21 11:16:57 PDT 2001


If no NH3 is flowing in the chamber, feedbk still shows 0.06 NH3. Is there a leak ?




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