From mokhberi at snf.stanford.edu  Mon Aug 19 09:58:35 2002
From: mokhberi at snf.stanford.edu (mokhberi at snf.stanford.edu)
Date: Aug 19, 2002 9:58:35 AM
Subject: Shutdown AG4108 2002-08-19 09:58:34: 
Message-ID: <mailman.52.1356280548.3222.ag4108-pcs@snf.stanford.edu>

lamp failure, center bank



From booth at snf.stanford.edu  Mon Aug 19 12:02:22 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Aug 19, 2002 12:02:22 PM
Subject: Shutdown AG4108 2002-08-19 09:58:34: 
Message-ID: <mailman.53.1356280548.3222.ag4108-pcs@snf.stanford.edu>

compared lamp calib data to previous data, & it
compares well.  recalibrated lamps & saved to
EEPROM.  Ran a test wafer with one of Alis dummy
wafers - OK