Shutdown AG4108 2002-08-19 09:58:34:

booth at snf.stanford.edu booth at snf.stanford.edu
Mon Aug 19 12:02:22 PDT 2002

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compared lamp calib data to previous data, & it
compares well.  recalibrated lamps & saved to
EEPROM.  Ran a test wafer with one of Alis dummy
wafers - OK

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