Shutdown AG4108 2002-07-24 07:06:40: AG4108 Silicide cassette not available

booth at snf.stanford.edu booth at snf.stanford.edu
Wed Jul 24 07:06:41 PDT 2002


Dan Grupp has stored wafers in one silicide cassette
since last Friday.
I do not have clean cassettes to move his wafers into.
When Dan moves his wafers, we can put the silicide
cassette in place on the AG4108
		Len




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