From mcconnel at snf.stanford.edu Mon Mar 4 11:39:50 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Mar 4, 2002 11:39:50 PM Subject: Problem AG4108 2002-03-04 23:39:50: AR/LoO2 out of set range error Message-ID: The second step of my recipe had an AR flow of 10. During the actual second step of the process, the AR flow only reached 5. Thus the error message, "AR LoO2 out of set range" appeared and the run automatically aborted with my wafer still in the furnace (but Cesar was around and helped me remove the wafer, so nothing is stuck in the machine). I had checked the AR pressure before and after the run, and it was at about 25 all the time. Otherwise I followed the instructions in the manual precisely, so I'm not sure what went wrong. From booth at snf.stanford.edu Tue Mar 5 09:30:30 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 5, 2002 9:30:30 AM Subject: Problem AG4108 2002-03-04 23:39:50: AR/LoO2 out of set range error Message-ID: found typo in config instructions. Updated config docs & reset Argon full flow rate for 10 LPM. Ran test recipe at 10 LPM with no problems. From khanh at snf.stanford.edu Thu Mar 14 12:51:38 2002 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Mar 14, 2002 12:51:38 PM Subject: Shutdown AG4108 2002-03-14 12:51:37: Disk error Message-ID: Message "Fatal disk error" appears when trying to format the diskette. From booth at snf.stanford.edu Wed Mar 20 11:20:56 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 20, 2002 11:20:56 AM Subject: Shutdown AG4108 2002-03-14 12:51:37: Disk error Message-ID: user error.