From booth at snf.stanford.edu  Wed Nov  6 07:08:06 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Nov 6, 2002 7:08:06 AM
Subject: Shutdown AG4108 2002-10-31 10:52:15: potentially breaking wafers
Message-ID: <mailman.56.1356280548.3222.ag4108-pcs@snf.stanford.edu>

reset machine, Uli cycled several clean 
wafers successfully - looks OK.