From xianliu at snf.stanford.edu  Mon Oct 21 06:16:02 2002
From: xianliu at snf.stanford.edu (xianliu at snf.stanford.edu)
Date: Oct 21, 2002 6:16:02 PM
Subject: Comment AG4108 2002-10-21 18:16:01: software crash 
Message-ID: <mailman.54.1356280548.3222.ag4108-pcs@snf.stanford.edu>

command screen froze after annealing and delivering wafer to receiving casette. Uli suggested disabling and enabling it again, which didn't help. Uli rebooted machine. It then worked fine for the next 4 runs.  



From mcconnel at snf.stanford.edu  Thu Oct 31 10:52:16 2002
From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu)
Date: Oct 31, 2002 10:52:16 AM
Subject: Shutdown AG4108 2002-10-31 10:52:15: potentially breaking wafers
Message-ID: <mailman.55.1356280548.3222.ag4108-pcs@snf.stanford.edu>

The machine seems to forget about wafers left on the cooling station after removing them from the furnace.  It may be a software problem with the wafer indexing, since yesterday I had 11 wafers yet it claimed to have processed only 10.