Comment AG4108 2002-10-21 18:16:01: software crash

xianliu at xianliu at
Mon Oct 21 06:16:02 PDT 2002

command screen froze after annealing and delivering wafer to receiving casette. Uli suggested disabling and enabling it again, which didn't help. Uli rebooted machine. It then worked fine for the next 4 runs.  

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