Comment AG4108 2002-10-21 18:16:01: software crash

xianliu at snf.stanford.edu xianliu at snf.stanford.edu
Mon Oct 21 06:16:02 PDT 2002


command screen froze after annealing and delivering wafer to receiving casette. Uli suggested disabling and enabling it again, which didn't help. Uli rebooted machine. It then worked fine for the next 4 runs.  




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