Shutdown AG4108 2002-10-31 10:52:15: potentially breaking wafers

mcconnel at snf.stanford.edu mcconnel at snf.stanford.edu
Thu Oct 31 10:52:16 PST 2002


The machine seems to forget about wafers left on the cooling station after removing them from the furnace.  It may be a software problem with the wafer indexing, since yesterday I had 11 wafers yet it claimed to have processed only 10.




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