From mcconnel at snf.stanford.edu Tue Apr 1 01:32:50 2003 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Apr 1, 2003 1:32:50 AM Subject: Shutdown AG4108 2003-04-01 01:32:49: Report Shutdown for AG4108 Message-ID: The software froze up after I ran one dummy wafer through the system. The robot had unloaded my wafer from the furnace to the cooling station and then to the receive cassette, and then it checked to see that there were no other wafers in the send cassette. Everything seemed normal, but after that the screen froze up and would no longer accept any inputs. I have no idea how to safely reboot the machine, so I am leaving it as is (the air, water, and vacuum are all on). From booth at snf.stanford.edu Tue Apr 1 07:19:14 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 1, 2003 7:19:14 AM Subject: Shutdown AG4108 2003-04-01 01:32:49: Report Clear for AG4108 Message-ID: system software froze up. Restarted system & checked Config 1 & 2 - OK. From jawad at snf.stanford.edu Fri Apr 25 11:01:52 2003 From: jawad at snf.stanford.edu (jawad at snf.stanford.edu) Date: Apr 25, 2003 11:01:52 AM Subject: Shutdown AG4108 2003-04-25 11:01:49: Report Shutdown for AG4108 Message-ID: touchscreen frozen after wafer came out. no wafer inside the machine From booth at snf.stanford.edu Fri Apr 25 11:34:36 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 25, 2003 11:34:36 AM Subject: Shutdown AG4108 2003-04-25 11:01:49: Report Clear for AG4108 Message-ID: restarted system, verified all parameters - OK