Problem AG4108 2003-07-26 16:55:33: Report Clear for AG4108

booth at snf.stanford.edu booth at snf.stanford.edu
Tue Aug 5 11:11:13 PDT 2003


Ted repaired NH3 panel.
Len ran NH3 recipe for 4 min @ 5 lpm
flow steady & indicated 4.85 lpm while
NH3 pressure went from 28psi @ no flow
to 22psi  @ 5 lpm flow.  NH3 flow is OK again.




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