Problem AG4108 2003-07-26 16:55:33: Out of ammonia

kailash at snf.stanford.edu kailash at snf.stanford.edu
Sat Jul 26 04:55:34 PDT 2003


hi,
It seems that the ammonia bottle in the basement may have run out. I ran an oxynitridation recipeand it stopped in the steady state. The ammonia gas flow starts of at the right value but drops a few seconds into the process. Both the reading on the screen and the reading on the valve on the leftside of the machine indicate so. The ammonia bottle may have been empty. Thanks,
- Kailash




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