From chion at snf.stanford.edu Tue Mar 18 02:40:27 2003 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Mar 18, 2003 2:40:27 PM Subject: Shutdown AG4108 2003-03-18 14:40:26: Process Stop Message-ID: Process Stop right at the Steady state.... From booth at snf.stanford.edu Tue Mar 18 02:43:18 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 18, 2003 2:43:18 PM Subject: Shutdown AG4108 2003-03-18 14:40:26: Report Clear for AG4108 Message-ID: restarted tool, software was hung-up. Checked Config1 & Config2 - OK. Touch screen was locked - not accepting input. From chion at snf.stanford.edu Tue Mar 18 03:18:31 2003 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Mar 18, 2003 3:18:31 PM Subject: Shutdown AG4108 2003-03-18 15:18:30: Process Stop Message-ID: Process stop at the steady step.... From booth at snf.stanford.edu Thu Mar 20 11:44:01 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 20, 2003 11:44:01 AM Subject: Shutdown AG4108 2003-03-18 15:18:30: Report Clear for AG4108 Message-ID: had to restart tool after it froze again during recipe. All system parameters were intact. Chion has run dummies OK. From evelyn at snf.stanford.edu Mon Mar 24 10:05:11 2003 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: Mar 24, 2003 10:05:11 AM Subject: Comment AG4108 2003-03-24 10:05:10: Report Comment for AG4108 Message-ID: I would like the tray changed from silicide to oxide when possible......thank you........evelyn From evelyn at snf.stanford.edu Mon Mar 24 12:10:07 2003 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: Mar 24, 2003 12:10:07 PM Subject: Comment AG4108 2003-03-24 12:10:06: Report Comment for AG4108 Message-ID: From booth at snf.stanford.edu Tue Mar 25 09:25:34 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 25, 2003 9:25:34 AM Subject: Problem AG4108 2002-02-20 15:00:12: Report Clear for AG4108 Message-ID: removing this Problem report from CORAL, users still need to check Config 1 & 2 values each time machine is used. From mcconnel at snf.stanford.edu Sun Mar 30 08:25:56 2003 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Mar 30, 2003 8:25:56 PM Subject: Problem AG4108 2003-03-30 20:25:55: Report Problem for AG4108 Message-ID: For my process, I would like the steady-state temperature to be 1100C. Tonight I tried a recipe that I have successfully used several times in the past, but the machine was unable to reach a temperature of 1100C. I first tried a ramp rate of 100C/s and it only reached a temperature of about 920C, resulting in error #68: temperature out of error window. I then tried a ramp rate of 60C/s. By the end of the steady-state step it had reached a temperature of only 1000C, resulting in error message #04: can't reach specified temperature. Is this a problem with the machine or with my recipe? From booth at snf.stanford.edu Mon Mar 31 01:23:45 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mar 31, 2003 1:23:45 PM Subject: Problem AG4108 2003-03-30 20:25:55: Report Clear for AG4108 Message-ID: talked to Angie - sounds like she is running a different kind/type of wafer than when she had originally optimized the recipe. I asked her to try the recipe again, using the same type as she used before. This should identify if something has changed with the tool, or not.