Problem AG4108 2003-03-30 20:25:55: Report Clear for AG4108

booth at snf.stanford.edu booth at snf.stanford.edu
Mon Mar 31 01:23:45 PST 2003


talked to Angie - sounds like she is running a different
kind/type of wafer than when she had originally optimized
the recipe.  I asked her to try the recipe again, using the
same type as she used before.  This should identify if 
something has changed with the tool, or not.




More information about the AG4108-pcs mailing list