From chion at snf.stanford.edu Mon May 5 11:32:52 2003 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: May 5, 2003 11:32:52 AM Subject: Problem AG4108 2003-05-05 11:32:50: Multiple lamp failure Message-ID: After every wafer, there's a false alarm on multiple lamp failure. System needs to be rebooted From booth at snf.stanford.edu Mon May 5 03:21:14 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 5, 2003 3:21:14 PM Subject: Problem AG4108 2003-05-05 11:32:50: Report Clear for AG4108 Message-ID: restarted tool, Chion is going to test recipe again. From uli at snf.stanford.edu Fri May 16 10:25:57 2003 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: May 16, 2003 10:25:57 AM Subject: Shutdown AG4108 2003-05-16 10:25:55: Report Shutdown for AG4108 Message-ID: 63 alarm during RTO run, N2 out of range From booth at snf.stanford.edu Fri May 16 11:11:16 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 16, 2003 11:11:16 AM Subject: Shutdown AG4108 2003-05-16 10:25:55: Report Clear for AG4108 Message-ID: Restarted system software, checked Configuration pages. From ychliu at snf.stanford.edu Sat May 24 11:45:12 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: May 24, 2003 11:45:12 AM Subject: Problem AG4108 2003-05-24 11:45:09: Green light not on even enabled in Coral Message-ID: From booth at snf.stanford.edu Sat May 24 11:51:23 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 24, 2003 11:51:23 AM Subject: Problem AG4108 2003-05-24 11:45:09: Report Clear for AG4108 Message-ID: System firmware had locked up. Reatarted system, checked Config 1 & 2 - OK Indicator light is green again. From ychliu at snf.stanford.edu Wed May 28 04:07:13 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: May 28, 2003 4:07:13 PM Subject: Problem AG4108 2003-05-28 16:07:13: Report Problem for AG4108 Message-ID: Machine disabled by itself when air and wafer were turned on. From booth at snf.stanford.edu Wed May 28 04:43:49 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 28, 2003 4:43:49 PM Subject: Problem AG4108 2003-05-28 16:07:13: Report Clear for AG4108 Message-ID: had to restart system twice after screen locked up. Config 1 & 2 came up OK. From chion at snf.stanford.edu Thu May 29 02:07:23 2003 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: May 29, 2003 2:07:23 PM Subject: Shutdown AG4108 2003-05-29 14:07:22: Report Shutdown for AG4108 Message-ID: Not enough cooling H2O. Possible guage problem. Rebooting doesn't help. From booth at snf.stanford.edu Fri May 30 11:21:17 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 30, 2003 11:21:17 AM Subject: Shutdown AG4108 2003-05-29 14:07:22: Report Clear for AG4108 Message-ID: repaired low flow at chiller. Replaced bad pressure guages at annealer. Water flow is 2 gpm @ ~15 psi upstairs at annealer.