From sjain at snf.stanford.edu Wed Sep 3 11:37:13 2003 From: sjain at snf.stanford.edu (sjain at snf.stanford.edu) Date: Sep 3, 2003 11:37:13 PM Subject: Shutdown AG4108 2003-09-03 23:37:13: Report Shutdown for AG4108 Message-ID: gives error: " 35: low oven H20 cooling flow" also dwyer gauge on the side has no red fluid at all. From booth at snf.stanford.edu Thu Sep 4 07:34:28 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 4, 2003 7:34:28 AM Subject: Shutdown AG4108 2003-09-03 23:37:13: Report Clear for AG4108 Message-ID: Cooling water flow checks out normal. From cmfaulkn at snf.stanford.edu Sun Sep 21 08:29:42 2003 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Sep 21, 2003 8:29:42 PM Subject: Shutdown AG4108 2003-09-21 20:29:39: Report Shutdown for AG4108 Message-ID: Got error 83: multiple lamp failure after successfully running one wafer and transfer arm was looking for another wafer. Lamps were off at the time. Left program loaded. From booth at snf.stanford.edu Mon Sep 22 07:11:15 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 22, 2003 7:11:15 AM Subject: Shutdown AG4108 2003-09-21 20:29:39: Report Clear for AG4108 Message-ID: checked lamp values - all look correct. checked all Config. parameters - all OK. Lamp test shows good. No problem found. From cmfaulkn at snf.stanford.edu Thu Sep 25 08:08:58 2003 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Sep 25, 2003 8:08:58 PM Subject: Problem AG4108 2003-09-25 20:08:57: Report Problem for AG4108 Message-ID: Wafers had particles on them after RTA (NH3 750C spike). Larger particles looked pink/purple. Number of particles decreased with each wafer. From rwoo at snf.stanford.edu Thu Sep 25 10:31:40 2003 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sep 25, 2003 10:31:40 PM Subject: Problem AG4108 2003-09-25 22:31:36: Particles during N2 anneal Message-ID: Particles also deposited on wafer during N2 1000 deg anneal. Also, chamber temperature did not reach 1000 deg and program aborted. Wafer and temp. graph on top of AG4108 manual binder. From booth at snf.stanford.edu Fri Sep 26 08:45:23 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 26, 2003 8:45:23 AM Subject: Shutdown AG4108 2003-09-26 08:45:23: Report Shutdown for AG4108 Message-ID: red/brown filth has contaminated Quartzware From uli at snf.stanford.edu Tue Sep 30 04:08:15 2003 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Sep 30, 2003 4:08:15 PM Subject: Shutdown AG4108 2003-09-26 08:45:23: Report Clear for AG4108 Message-ID: ran test wafers. System is ready to use. From uli at snf.stanford.edu Tue Sep 30 04:08:32 2003 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Sep 30, 2003 4:08:32 PM Subject: Problem AG4108 2003-09-25 22:31:36: Report Clear for AG4108 Message-ID: From uli at snf.stanford.edu Tue Sep 30 04:08:35 2003 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Sep 30, 2003 4:08:35 PM Subject: Problem AG4108 2003-09-25 20:08:57: Report Clear for AG4108 Message-ID: