Shutdown AG4108 2003-09-21 20:29:39: Report Shutdown for AG4108

cmfaulkn at snf.stanford.edu cmfaulkn at snf.stanford.edu
Sun Sep 21 08:29:42 PDT 2003


Got error 83:  multiple lamp failure after successfully running one wafer and transfer arm was looking for another wafer.  Lamps were off at the time.  Left program loaded.




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