Problem AG4108 2003-09-25 20:08:57: Report Problem for AG4108

cmfaulkn at snf.stanford.edu cmfaulkn at snf.stanford.edu
Thu Sep 25 08:08:58 PDT 2003

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Wafers had particles on them after RTA (NH3 750C spike).  Larger particles looked pink/purple.  Number of particles decreased with each wafer.

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Next message: Problem AG4108 2003-09-25 22:31:36: Particles during N2 anneal
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