From uli at snf.stanford.edu Thu Apr 1 15:03:21 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 1 Apr 2004 15:03:21 -0800 Subject: Shutdown AG4108 2004-04-01 15:03:21: film in chamber Message-ID: From eenriquez at snf.stanford.edu Fri Apr 2 14:40:43 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Apr 2004 14:40:43 -0800 Subject: Shutdown AG4108 2004-04-01 15:03:21: film in chamber Message-ID: Cleaned brown film with DI water and IPA From eenriquez at snf.stanford.edu Fri Apr 2 14:41:28 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Apr 2004 14:41:28 -0800 Subject: Comment AG4108 2004-03-23 07:51:57: Installed silicide tray Message-ID: Oxidation tray has been installed From eenriquez at snf.stanford.edu Fri Apr 2 14:42:22 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Apr 2004 14:42:22 -0800 Subject: Comment AG4108 2004-04-02 14:42:21: Oxidation tray is installed Message-ID: From sjain at snf.stanford.edu Mon Apr 5 10:25:12 2004 From: sjain at snf.stanford.edu (sjain at snf.stanford.edu) Date: Mon, 5 Apr 2004 10:25:12 -0700 Subject: Comment AG4108 2004-04-05 10:25:12: silicide tray in Message-ID: From uli at snf.stanford.edu Tue Apr 6 09:59:31 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 6 Apr 2004 09:59:31 -0700 Subject: Comment AG4108 2004-04-02 14:42:21: Oxidation tray is installed Message-ID: From eenriquez at snf.stanford.edu Tue Apr 13 07:54:02 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Apr 2004 07:54:02 -0700 Subject: Comment AG4108 2004-04-05 10:25:12: silicide tray in Message-ID: Changing to oxidation tray From eenriquez at snf.stanford.edu Tue Apr 13 07:54:29 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Apr 2004 07:54:29 -0700 Subject: Comment AG4108 2004-04-05 10:25:12: silicide tray in Message-ID: Changing to oxidation tray From eenriquez at snf.stanford.edu Tue Apr 13 07:54:34 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Apr 2004 07:54:34 -0700 Subject: Comment AG4108 2004-04-13 07:53:48: Installed oxidation tray Message-ID: From uli at snf.stanford.edu Mon Apr 19 14:56:17 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Mon, 19 Apr 2004 14:56:17 -0700 Subject: Shutdown AG4108 2004-04-19 14:56:15: AG4108 contaminated Message-ID: chamber and tray are contaminated. Jim McVittie will inspect the chamber From eenriquez at snf.stanford.edu Wed Apr 21 10:14:10 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Apr 2004 10:14:10 -0700 Subject: Shutdown AG4108 2004-04-19 14:56:15: AG4108 contaminated Message-ID: Cleaned chamber using DI water and IPA. From eenriquez at snf.stanford.edu Wed Apr 21 10:14:34 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Apr 2004 10:14:34 -0700 Subject: Shutdown AG4108 2004-04-16 23:30:40: screen frozen Message-ID: Reset computer. From eenriquez at snf.stanford.edu Wed Apr 21 10:14:53 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Apr 2004 10:14:53 -0700 Subject: Comment AG4108 2004-04-13 07:53:48: Installed oxidation tray Message-ID: Installed silicide tray From eenriquez at snf.stanford.edu Wed Apr 21 10:15:13 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Apr 2004 10:15:13 -0700 Subject: Comment AG4108 2004-04-21 10:15:13: Installed silicide tray Message-ID: From uli at snf.stanford.edu Wed Apr 21 12:28:34 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 21 Apr 2004 12:28:34 -0700 Subject: Shutdown AG4108 2004-04-21 12:28:29: AG4108 contaminated Message-ID: chamber and oxide tray need HF clean From eenriquez at snf.stanford.edu Wed Apr 21 14:37:56 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Apr 2004 14:37:56 -0700 Subject: Shutdown AG4108 2004-04-21 12:28:29: AG4108 contaminated Message-ID: Yao wants to run the system knowing that it might be contaminated. I will put it back down after his runs. --Elmer From ychliu at snf.stanford.edu Wed Apr 21 16:57:30 2004 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Wed, 21 Apr 2004 16:57:30 -0700 Subject: Shutdown AG4108 2004-04-21 16:57:29: Chamber still needs cleaning Message-ID: From eenriquez at snf.stanford.edu Fri Apr 23 13:48:35 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Apr 2004 13:48:35 -0700 Subject: Shutdown AG4108 2004-04-21 16:57:29: Chamber still needs cleaning Message-ID: From sjain at snf.stanford.edu Tue Apr 27 16:53:21 2004 From: sjain at snf.stanford.edu (sjain at snf.stanford.edu) Date: Tue, 27 Apr 2004 16:53:21 -0700 Subject: Problem AG4108 2004-04-27 16:53:21: RTA yet to be cleaned Message-ID: From eenriquez at snf.stanford.edu Wed Apr 28 15:51:36 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Apr 2004 15:51:36 -0700 Subject: Problem AG4108 2004-04-27 16:53:21: RTA yet to be cleaned Message-ID: Jim Mc cleaned the tube and both trays. Installed clean tube and the OXIDATION TRAY. From eenriquez at snf.stanford.edu Wed Apr 28 15:52:03 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Apr 2004 15:52:03 -0700 Subject: Comment AG4108 2004-04-21 10:15:13: Installed silicide tray Message-ID: INSTALLED OXIDATION TRAY. From eenriquez at snf.stanford.edu Wed Apr 28 15:52:44 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Apr 2004 15:52:44 -0700 Subject: Comment AG4108 2004-04-28 15:52:33: Installed oxidation tray Message-ID: From eenriquez at snf.stanford.edu Fri Apr 30 10:19:12 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Apr 2004 10:19:12 -0700 Subject: Comment AG4108 2004-04-28 15:52:33: Installed oxidation tray Message-ID: Installed silicide tray From eenriquez at snf.stanford.edu Fri Apr 30 10:19:35 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Apr 2004 10:19:35 -0700 Subject: Comment AG4108 2004-04-30 10:19:34: Installed silicide tray Message-ID: