Shutdown AG4108 2004-04-01 15:03:21: film in chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Apr 2 14:40:43 PST 2004
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Shutdown AG4108 2004-04-01 15:03:21: film in chamber
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Comment AG4108 2004-03-23 07:51:57: Installed silicide tray
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Cleaned brown film with DI water and IPA
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Shutdown AG4108 2004-04-01 15:03:21: film in chamber
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Comment AG4108 2004-03-23 07:51:57: Installed silicide tray
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