From eenriquez at snf.stanford.edu  Wed Jul 14 07:49:10 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 14 Jul 2004 07:49:10 -0700
Subject: Comment AG4108 SNF 2004-06-24 14:11:37: Installed oxidation tray
Message-ID: <mailman.168.1356280549.3222.ag4108-pcs@snf.stanford.edu>

installed silicide tray



From eenriquez at snf.stanford.edu  Wed Jul 14 07:49:34 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 14 Jul 2004 07:49:34 -0700
Subject: Comment AG4108 SNF 2004-07-14 07:49:32: Installed silicide tray
Message-ID: <mailman.169.1356280549.3222.ag4108-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Jul 16 08:41:23 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 16 Jul 2004 08:41:23 -0700
Subject: Comment AG4108 SNF 2004-07-14 07:49:32: Installed silicide tray
Message-ID: <mailman.170.1356280549.3222.ag4108-pcs@snf.stanford.edu>

installed oxidation tray



From eenriquez at snf.stanford.edu  Fri Jul 16 08:42:10 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 16 Jul 2004 08:42:10 -0700
Subject: Comment AG4108 SNF 2004-07-16 08:41:44: installed oxidation tray
Message-ID: <mailman.171.1356280549.3222.ag4108-pcs@snf.stanford.edu>




From barlian at snf.stanford.edu  Sat Jul 17 18:04:57 2004
From: barlian at snf.stanford.edu (barlian at snf.stanford.edu)
Date: Sat, 17 Jul 2004 18:04:57 -0700
Subject: Problem AG4108 SNF 2004-07-17 18:04:57: can't touch on the screen
Message-ID: <mailman.172.1356280549.3222.ag4108-pcs@snf.stanford.edu>

I ran 7 wafers, everything went well, the process/charts were great. When it's done, I took the receiver cassette out, tranfered the wafers, and put the empty cassette back in place. However, I could not touch the screen to go back to the Main menu to turn off the air, vacuum, etc. The screen freezed.



From barlian at snf.stanford.edu  Sat Jul 17 19:04:17 2004
From: barlian at snf.stanford.edu (barlian at snf.stanford.edu)
Date: Sat, 17 Jul 2004 19:04:17 -0700
Subject: Comment AG4108 SNF 2004-07-17 19:04:17: problem solved...
Message-ID: <mailman.173.1356280549.3222.ag4108-pcs@snf.stanford.edu>

Thanks to YaoCheng... the machine has been shut down properly....



From eenriquez at snf.stanford.edu  Mon Jul 19 09:58:53 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 19 Jul 2004 09:58:53 -0700
Subject: Comment AG4108 SNF 2004-07-17 19:04:17: problem solved...
Message-ID: <mailman.174.1356280549.3222.ag4108-pcs@snf.stanford.edu>

Thanks



From eenriquez at snf.stanford.edu  Mon Jul 19 09:59:30 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 19 Jul 2004 09:59:30 -0700
Subject: Problem AG4108 SNF 2004-07-17 18:04:57: can't touch on the screen
Message-ID: <mailman.175.1356280549.3222.ag4108-pcs@snf.stanford.edu>

improperly shutdown.  tool ok



From eenriquez at snf.stanford.edu  Fri Jul 30 14:46:53 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 30 Jul 2004 14:46:53 -0700
Subject: Comment AG4108 SNF 2004-07-16 08:41:44: installed oxidation tray
Message-ID: <mailman.176.1356280549.3222.ag4108-pcs@snf.stanford.edu>

Installed silicide tray



From eenriquez at snf.stanford.edu  Fri Jul 30 14:47:09 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 30 Jul 2004 14:47:09 -0700
Subject: Comment AG4108 SNF 2004-07-30 14:47:08: Installed silicide tray
Message-ID: <mailman.177.1356280549.3222.ag4108-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Jul 30 14:54:34 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 30 Jul 2004 14:54:34 -0700
Subject: Comment AG4108 SNF 2004-07-30 14:54:33: Film inside the quartz chamber
Message-ID: <mailman.178.1356280549.3222.ag4108-pcs@snf.stanford.edu>

The quartz chamber has a brown ring shaped  film inside. It is  above where the wafer would sit. There is also a whitish haze in the same area.