Problem AG4108 SNF 2004-07-17 18:04:57: can't touch on the screen

barlian at snf.stanford.edu barlian at snf.stanford.edu
Sat Jul 17 18:04:57 PDT 2004


I ran 7 wafers, everything went well, the process/charts were great. When it's done, I took the receiver cassette out, tranfered the wafers, and put the empty cassette back in place. However, I could not touch the screen to go back to the Main menu to turn off the air, vacuum, etc. The screen freezed.




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