Comment AG4108 SNF 2004-07-30 14:54:33: Film inside the quartz chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 30 14:54:34 PDT 2004


The quartz chamber has a brown ring shaped  film inside. It is  above where the wafer would sit. There is also a whitish haze in the same area.




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