From rcrane at snf.stanford.edu Wed Mar 3 10:02:44 2004 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Wed, 3 Mar 2004 10:02:44 -0800 Subject: Problem AG4108 2004-02-24 10:37:13: residue in chamber Message-ID: Problem cleared 2/25. Chamber quartzware cleaned. From uli at snf.stanford.edu Wed Mar 3 17:49:33 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 3 Mar 2004 17:49:33 -0800 Subject: Problem AG4108 2004-03-03 17:49:32: Report Problem for AG4108 Message-ID: brown film is still there From eenriquez at snf.stanford.edu Wed Mar 10 07:34:58 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Mar 2004 07:34:58 -0800 Subject: Comment AG4108 2004-03-10 07:34:57: Change tray to oxidation Message-ID: From uli at snf.stanford.edu Wed Mar 10 11:55:34 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 10 Mar 2004 11:55:34 -0800 Subject: Shutdown AG4108 2004-03-10 11:55:33: brown film in chamber Message-ID: the color of the film has changed from light brown to dark brown. I am going to run some tests Uli From uli at snf.stanford.edu Wed Mar 10 15:54:08 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 10 Mar 2004 15:54:08 -0800 Subject: Shutdown AG4108 2004-03-10 11:55:33: brown film in chamber Message-ID: chamber has been cleaned From uli at snf.stanford.edu Wed Mar 10 15:55:47 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 10 Mar 2004 15:55:47 -0800 Subject: Problem AG4108 2004-03-03 17:49:32: Report Problem for AG4108 Message-ID: chamber has been cleaned From eenriquez at snf.stanford.edu Wed Mar 17 08:27:14 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Mar 2004 08:27:14 -0800 Subject: Comment AG4108 2004-03-17 08:27:12: Installed silicide tray Message-ID: From eenriquez at snf.stanford.edu Wed Mar 17 08:28:01 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Mar 2004 08:28:01 -0800 Subject: Comment AG4108 2004-03-10 07:34:57: Change tray to oxidation Message-ID: From eenriquez at snf.stanford.edu Fri Mar 19 13:48:51 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Mar 2004 13:48:51 -0800 Subject: Comment AG4108 2004-03-17 08:27:12: Installed silicide tray Message-ID: Installed oxide From eenriquez at snf.stanford.edu Fri Mar 19 13:49:05 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Mar 2004 13:49:05 -0800 Subject: Comment AG4108 2004-03-19 13:49:04: Installed oxide tray Message-ID: From eenriquez at snf.stanford.edu Tue Mar 23 07:51:29 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Mar 2004 07:51:29 -0800 Subject: Comment AG4108 2004-03-19 13:49:04: Installed oxide tray Message-ID: now installing silicide tray From eenriquez at snf.stanford.edu Tue Mar 23 07:51:58 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Mar 2004 07:51:58 -0800 Subject: Comment AG4108 2004-03-23 07:51:57: Installed silicide tray Message-ID: From ychliu at snf.stanford.edu Tue Mar 23 23:26:12 2004 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Tue, 23 Mar 2004 23:26:12 -0800 Subject: Problem AG4108 2004-03-23 23:26:11: chamber contaminated Message-ID: A big (about a wafer size) brown spot was found on top of the chamber before I ran any process. From uli at snf.stanford.edu Wed Mar 24 10:04:10 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 24 Mar 2004 10:04:10 -0800 Subject: Shutdown AG4108 2004-03-24 10:04:06: chamber contaminated Message-ID: From uli at snf.stanford.edu Wed Mar 24 16:23:28 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 24 Mar 2004 16:23:28 -0800 Subject: Shutdown AG4108 2004-03-24 10:04:06: chamber contaminated Message-ID: chamber has been cleaned using IPA on wipe From uli at snf.stanford.edu Wed Mar 24 16:23:48 2004 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 24 Mar 2004 16:23:48 -0800 Subject: Problem AG4108 2004-03-23 23:26:11: chamber contaminated Message-ID: chamber has been cleaned