Problem AG4108 2004-03-23 23:26:11: chamber contaminated

ychliu at snf.stanford.edu ychliu at snf.stanford.edu
Tue Mar 23 23:26:12 PST 2004

Previous message: Comment AG4108 2004-03-23 07:51:57: Installed silicide tray
Next message: Problem AG4108 2004-03-23 23:26:11: chamber contaminated
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

A big (about a wafer size) brown spot was found on top of the chamber before I ran any process.

Previous message: Comment AG4108 2004-03-23 07:51:57: Installed silicide tray
Next message: Problem AG4108 2004-03-23 23:26:11: chamber contaminated
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the AG4108-pcs mailing list