Shutdown AG4108 SNF 2005-04-09 15:25:01: power shut off during process

barlian at snf.stanford.edu barlian at snf.stanford.edu
Sat Apr 9 15:25:01 PDT 2005


I was running a process, at steady state, the power just shut off suddenly. My wafer is still inside the chamber. The other one is still in the right cassette. Hopefully, I get both wafers back.




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